Detectable Gases

Target Gas Range
(ppm)
TLV-TWA
(ACGIH)
Remarks
Name  Chemical Formula System No.
Low Standard High (ppm)
Chlorine Cl2 100 0.3 1.5 10 0.5  
Hydrogen Sulfide H2S 200 0.3 30 200 1  
Hydrogen Cyanide HCN 300 3 15 100 C 4.7  
Hydrogen Chloride HCl 400   6 15 C 2  
Sulfur Dioxide SO2 500   6 15 0.25 (STEL)  
Phosgene COCl2 600   5   0.1  
Hydrogen Fluoride HF 700   9   0.5  
Ozone O3 800 0.3 1 3 0.1  
Bromine/Iodine Br2/I2 900 0.3 3 10   Br20.1ppm,
I2 0.01ppm
Oxygen O2 1100 5% 25% 50% -  
Carbon Monoxide CO  1200 50 75 1000 25  
Fluorine F2 1400 1 3 10 1  
Chlorine Trifluoride ClF3 1400   0.3   C 0.1  
Hydrogen H2  1500 1000 4000 4% -  
Acetic Acid CH3COOH 1600   30   10  
Nitrogen Dioxide NO2 1700   9   3  
Nitric Oxide NO 1700   100   25  
Methanol CH3OH 2100   600   200  
Ethanol C2H5OH 2100   1000   1000(STEL)  
Isopropyl Alcohol  CH3CH(OH)CH3  2100   600 1000 200  
  2%     NDIR Sensor
Ethylene Oxide C2H4O 2200   150   1  
Combustible Gas CH4 etc. 2300       100%LEL -  
Ammonia NH3 2400   75 200 25  
Dimethyl Amine (CH3)2NH 2400   30   5  
Hydrazine N2H4 2500   1   0.01  
TDMAT Ti[(CH3)2N]4 2500   1   -  
TEOS Si(C2H5O)4 3000   30   10  
Gen. Acid. - 3100  - depends on Gas -  -  
Hydrogen Selenide H2Se 3200 0.2 1   0.05  
H.C./VOC - 3300  - depends on Gas -  -  
Chloride - 3400  - depends on Gas -  -  
Fluoride - 3700  - depends on Gas -  -  
Hydride - 4000  - depends on Gas -  - for Dry Scrubber
Nitrogen Trifluoride NF3 4100   30   10  
Chlorinated Hydrocarbons - 4300  - depends on Gas -  -  
Methyl Bromide/Methyl Iodide CH3Br/CH3I 4400   50 150   CH3Br 1ppm, CH3I 2ppm
Sulfur Hexafluoride  SF6  4500   200 1500 1000  
  300 5000   NDIR Sensor
Nitrous Oxide N2O 4600   300   50 NDIR Sensor
CFCs - 4700  - depends on Gas -  -  
Tetrafluoromethane CF4  4700   500 5000 - NDIR Sensor
Acrylonitrile CH2=CHCN 4900   60   2  
Silane SiH4 5000 1 15   5  
Phosphine PH3 5000   1   0.3  
Arsine AsH3 5000   0.2   0.005  
Germane GeH4 5000   0.6   0.2  
Trimethyl Silane (CH3)3SiH 5000   15   -  
Monomethyl Silane CH3SiH3 5000   15   -  
H.C. - 5300  - depends on Gas -  - Heated Semiconductor sensor

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